发明授权
- 专利标题： Getter structure and method for forming such structure
- 专利标题（中）： 吸气剂结构和形成这种结构的方法
-
申请号： US14193437申请日： 2014-02-28
-
公开(公告)号： US09196556B2公开(公告)日： 2015-11-24
- 发明人: Roland Gooch , Adam M. Kennedy , Stephen H. Black , Thomas Allan Kocian , Buu Diep
- 申请人： Raytheon Company
- 申请人地址： US MA Waltham
- 专利权人： RAYTHEON COMPANY
- 当前专利权人： RAYTHEON COMPANY
- 当前专利权人地址： US MA Waltham
- 代理机构： Daly, Crowley, Mofford & Durkee, LLP
- 主分类号： H01L23/26
- IPC分类号： H01L23/26 ; B32B3/10 ; B32B15/04
摘要：
A getter structure and method wherein a layer of seed material is deposited on a predetermined region of a surface of a structure under conditions to form a plurality of nucleation sites on a surface of the structure. The nucleation sites have an average height over the surface area of the predetermined region of less than one molecule thick. Subsequently a getter material is deposited over the surface to form a plurality of getter material members projecting outwardly from the nucleation sites.
公开/授权文献
- US20150249042A1 GETTER STRUCTURE AND METHOD FOR FORMING SUCH STRUCTURE 公开/授权日：2015-09-03
信息查询
IPC分类:
