发明授权
- 专利标题: Chip package and fabrication method thereof
- 专利标题(中): 芯片封装及其制造方法
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申请号: US14516492申请日: 2014-10-16
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公开(公告)号: US09196754B2公开(公告)日: 2015-11-24
- 发明人: Chia-Sheng Lin
- 申请人: XINTEC INC.
- 申请人地址: TW Taoyuan
- 专利权人: XINTEC INC.
- 当前专利权人: XINTEC INC.
- 当前专利权人地址: TW Taoyuan
- 代理机构: Liu & Liu
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L31/02 ; H01L21/768 ; H01L23/31 ; H01L23/48 ; H01L23/525 ; H01L27/146 ; H01L31/0232 ; H01L31/18 ; H01L33/58 ; H01L33/62 ; H01L23/00
摘要:
A chip package is disclosed. The package includes a semiconductor chip having a first surface and a second surface opposite thereto, at least one conductive pad adjacent to the first surface, and an opening extending toward the first surface from the second surface to expose the conductive pad. The caliber adjacent to the first surface is greater than that of the opening adjacent to the second surface. An insulating layer and a redistribution layer (RDL) are successively disposed on the second surface and extend to a sidewall and a bottom of the opening, in which the RDL is electrically connected to the conductive pad through the opening. A passivation layer covers the RDL and partially fills the opening to form a void between the passivation layer and the conductive pad in the opening. A fabrication method of the chip package is also disclosed.
公开/授权文献
- US20150035143A1 CHIP PACKAGE AND FABRICATION METHOD THEREOF 公开/授权日:2015-02-05
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