Invention Grant
- Patent Title: Method of fabricating a single-piece micromechanical component including at least two distinct functional levels
- Patent Title (中): 制造包括至少两个不同功能水平的单件微机械部件的方法
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Application No.: US14176322Application Date: 2014-02-10
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Publication No.: US09197183B2Publication Date: 2015-11-24
- Inventor: Alexandre Fussinger , Marc Stranczl
- Applicant: Nivarox-FAR S.A.
- Applicant Address: CH Le Locle
- Assignee: Nivarox-FAR S.A.
- Current Assignee: Nivarox-FAR S.A.
- Current Assignee Address: CH Le Locle
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP13155068 20130213
- Main IPC: G04B15/14
- IPC: G04B15/14 ; H03H3/00 ; B81C99/00 ; C23F1/02 ; H03H3/007 ; G03F7/00
Abstract:
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.
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