发明授权
- 专利标题： Thermally shorted bolometer
- 专利标题（中）： 热短路辐射热量计
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申请号： US14504749申请日： 2014-10-02
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公开(公告)号： US09199838B2公开(公告)日： 2015-12-01
- 发明人: Gary O'Brien , Fabian Purkl , Ando Feyh , Bongsang Kim , Ashwin K Samarao , Thomas Rocznik , Gary Yama
- 申请人： Robert Bosch GmbH
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Maginot Moore & Beck LLP
- 主分类号： G01J5/02
- IPC分类号： G01J5/02 ; B81B7/00 ; B81B7/02 ; G01J5/08 ; G01J5/20
摘要：
In one embodiment, A MEMS sensor assembly includes a substrate, a first sensor supported by the substrate and including a first absorber spaced apart from the substrate, and a second sensor supported by the substrate and including (i) a second absorber spaced apart from the substrate, and (ii) at least one thermal shorting portion integrally formed with the second absorber and extending downwardly from the second absorber to the substrate thereby thermally shorting the second absorber to the substrate.
公开/授权文献
- US20150115160A1 Thermally Shorted Bolometer 公开/授权日：2015-04-30
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