Invention Grant
US09209000B2 Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes 有权
气体流量分配容器,等离子体发生器系统和用于执行等离子体剥离工艺的方法

Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes
Abstract:
Systems, system components, and methods for plasma stripping are provided. In an embodiment, a gas flow distribution receptacle may have a rounded section that includes an inner surface defining a reception cavity, an outer surface forming an enclosed end, and a centerpoint on the outer surface having a longitudinal axis extending therethrough and through the reception cavity. First and second rings of openings provide flow communication with the plasma chamber. The second ring of openings are disposed between the first ring and the centerpoint, and each opening of the second ring of openings extends between the inner and outer surfaces at a second angle relative to the longitudinal axis that is less than the first angle and has a diameter that is substantially identical to a diameter of an adjacent opening and smaller than the diameters of an opening of the first ring of openings.
Information query
Patent Agency Ranking
0/0