Invention Grant
- Patent Title: Magnetic recording medium fabrication method and apparatus
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Application No.: US14149914Application Date: 2014-01-08
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Publication No.: US09214178B2Publication Date: 2015-12-15
- Inventor: Yasuyuki Tsutatani , Daisuke Shiomi
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2013-004783 20130115
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G11B5/84

Abstract:
A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The stacked body is enclosed in a transfer container unit without exposing the stacked body to atmosphere after forming the protection layer on the stacked body by a deposition apparatus, and the transfer container unit is transported to a vapor-phase lubrication deposition apparatus. The stacked body is removed from the transfer container unit without exposing the stacked body to the atmosphere, in order to form the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus.
Public/Granted literature
- US20140199476A1 MAGNETIC RECORDING MEDIUM FABRICATION METHOD AND APPARATUS Public/Granted day:2014-07-17
Information query
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