Invention Grant
US09219045B2 Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask
有权
半导体器件和导电凸块材料在无焊接掩模回流时自我约束的方法
- Patent Title: Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask
- Patent Title (中): 半导体器件和导电凸块材料在无焊接掩模回流时自我约束的方法
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Application No.: US14160796Application Date: 2014-01-22
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Publication No.: US09219045B2Publication Date: 2015-12-22
- Inventor: Rajendra D. Pendse
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/48 ; H01L23/52 ; H01L23/00 ; H01L21/56 ; H01L23/31 ; H01L23/498

Abstract:
A semiconductor device has a semiconductor die with a die bump pad and substrate with a trace line and integrated bump pad. Conductive bump material is deposited on the substrate bump pad or die bump pad. The semiconductor die is mounted over the substrate so that the bump material is disposed between the die bump pad and substrate bump pad. The bump material is reflowed without a solder mask around the die bump pad or substrate bump pad to form an interconnect. The bump material is self-confined within a footprint of the die bump pad or substrate bump pad. The bump material can be immersed in a flux solution prior to reflow to increase wettability. Alternatively, the interconnect includes a non-fusible base and fusible cap. The volume of bump material is selected so that a surface tension maintains self-confinement of the bump material within the bump pads during reflow.
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