Invention Grant
- Patent Title: Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
- Patent Title (中): 有机层沉积装置及使用其的有机发光显示装置的制造方法
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Application No.: US14084275Application Date: 2013-11-19
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Publication No.: US09219255B2Publication Date: 2015-12-22
- Inventor: Jae-Sun Jung , Byung-Min Jang , Na-Jeong Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2013-0063080 20130531
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/56 ; C23C14/04 ; C23C14/24 ; C23C14/56 ; H01L21/677 ; H01L21/683 ; H01L51/00

Abstract:
An organic layer deposition apparatus includes a conveyer unit and a deposition unit that has one or more organic layer deposition assemblies configured to deposit an organic layer on a moving substrate. The conveyer unit includes a moving unit configured to move a substrate fixed thereto, a first conveyer unit configured to move the moving unit in a first direction during which an organic material is deposited on the substrate fixed to the moving unit, and a second conveyer unit configured to move the moving unit in a second direction opposite to the first direction after deposition is completed and the substrate is separated from the moving unit. The first conveyer unit and the second conveyer unit are configured to move through the deposition unit.
Public/Granted literature
Information query
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