公开(公告)号：US09219255B2

公开(公告)日：2015-12-22

申请号：US14084275

申请日：2013-11-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jae-Sun Jung ,  Byung-Min Jang ,  Na-Jeong Kim

IPC: H01L21/00 ,  H01L51/56 ,  C23C14/04 ,  C23C14/24 ,  C23C14/56 ,  H01L21/677 ,  H01L21/683 ,  H01L51/00

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/24 ,  C23C14/568 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/6831 ,  H01L51/0003 ,  H01L51/001

Abstract: An organic layer deposition apparatus includes a conveyer unit and a deposition unit that has one or more organic layer deposition assemblies configured to deposit an organic layer on a moving substrate. The conveyer unit includes a moving unit configured to move a substrate fixed thereto, a first conveyer unit configured to move the moving unit in a first direction during which an organic material is deposited on the substrate fixed to the moving unit, and a second conveyer unit configured to move the moving unit in a second direction opposite to the first direction after deposition is completed and the substrate is separated from the moving unit. The first conveyer unit and the second conveyer unit are configured to move through the deposition unit.

Abstract translation: 有机层沉积设备包括输送单元和沉积单元，该沉积单元具有一个或多个有机层沉积组件，其被配置成将有机层沉积在移动的基板上。 所述输送单元包括移动单元，所述移动单元被配置为移动固定到其上的基板;第一输送单元，被配置成沿着固定到所述移动单元的所述基板上沉积有机材料的第一方向移动所述移动单元;以及第二输送单元 被构造成在沉积完成并且所述基板与所述移动单元分离之后，沿与所述第一方向相反的第二方向移动所述移动单元。 第一输送单元和第二输送单元构造成移动通过沉积单元。