发明授权
- 专利标题: Hierarchical carbon nano and micro structures
- 专利标题(中): 分层碳纳米微结构
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申请号: US14114819申请日: 2012-05-03
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公开(公告)号: US09221684B2公开(公告)日: 2015-12-29
- 发明人: Michael De Volder
- 申请人: Michael De Volder
- 申请人地址: BE Leuven BE Leuven
- 专利权人: IMEC,Katholieke Universiteit Leuven, KU Leuven R&D
- 当前专利权人: IMEC,Katholieke Universiteit Leuven, KU Leuven R&D
- 当前专利权人地址: BE Leuven BE Leuven
- 代理机构: McDonnell Boehnen Hulbert & Berghoff LLP
- 国际申请: PCT/EP2012/058066 WO 20120503
- 国际公布: WO2012/150278 WO 20121108
- 主分类号: B44C1/22
- IPC分类号: B44C1/22 ; C01B31/02 ; B82Y30/00 ; B82Y40/00 ; B81C1/00 ; C01B31/00
摘要:
Disclosed are methods for fabricating pyrolysed carbon nanostructures. An example method includes providing a substrate, depositing a polymeric material, subjecting the polymeric material to a plasma etching process to form polymeric nanostructures, and pyrolysing the polymeric nanostructures to form carbon nanostructures. The polymeric material comprises either compounds with different plasma etch rates or compounds that can mask a plasma etching process. The plasma etching process may be an oxygen plasma etching process.
公开/授权文献
- US20140079921A1 Hierarchical Carbon Nano and Micro Structures 公开/授权日:2014-03-20
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