Invention Grant
- Patent Title: Generalized virtual inspector
- Patent Title (中): 广义虚拟检查员
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Application No.: US14184417Application Date: 2014-02-19
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Publication No.: US09222895B2Publication Date: 2015-12-29
- Inventor: Brian Duffy , Kris Bhaskar
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G01N21/95 ; G06T7/00 ; G06T7/60

Abstract:
Generalized virtual inspectors are provided. One system includes two or more actual systems configured to perform one or more processes on specimen(s) while the specimen(s) are disposed within the actual systems. The system also includes one or more virtual systems coupled to the actual systems to thereby receive output generated by the actual systems and to send information to the actual systems. The virtual system(s) are configured to perform one or more functions using at least some of the output received from the actual systems. The virtual system(s) are not capable of having the specimen(s) disposed therein.
Public/Granted literature
- US20140241610A1 Generalized Virtual Inspector Public/Granted day:2014-08-28
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