Invention Grant
- Patent Title: Forming cross-coupled line segments
- Patent Title (中): 形成交叉耦合线段
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Application No.: US14167071Application Date: 2014-01-29
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Publication No.: US09224617B2Publication Date: 2015-12-29
- Inventor: David Pritchard , Jason E. Stephens
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Nicholas Mesiti, Esq.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/308 ; H01L27/02

Abstract:
A method is provided for fabricating cross-coupled line segments for use, for instance, as a hard mask in fabricating cross-coupled gates of two or more transistors. Fabricating the structure includes: providing a sacrificial mandrel on the substrate, the sacrificial mandrel including a transverse gap through the mandrel separating the sacrificial mandrel into a first mandrel portion and a second mandrel portion; providing a sidewall spacer along sidewalls of the sacrificial mandrel, where sidewall spacers along sidewalls of the first mandrel portion and the second mandrel portion merge within the transverse gap and form a crossbar; and removing the sacrificial mandrel and selectively cutting the sidewall spacers to define the cross-coupled line segments from the sidewall spacers and crossbar. The transverse gap may be provided by directly printing the first and second mandrel portions spaced apart, or by cutting the sacrificial mandrel to provide the gap.
Public/Granted literature
- US20150214064A1 FORMING CROSS-COUPLED LINE SEGMENTS Public/Granted day:2015-07-30
Information query
IPC分类: