Invention Grant
- Patent Title: Terminal structure, and semiconductor element and module substrate comprising the same
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Application No.: US13960330Application Date: 2013-08-06
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Publication No.: US09224706B2Publication Date: 2015-12-29
- Inventor: Kenichi Yoshida , Makoto Orikasa , Hideyuki Seike , Yuhei Horikawa , Hisayuki Abe
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-184990 20120824
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00

Abstract:
A preferred terminal structure comprises a base material; an electrode formed on the base material; an insulating covering layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under bump metal layer containing Ni, formed in a region in the opening on the electrode so that an upper surface of the metal layer is at a position lower than an upper surface of the insulating covering layer in a peripheral edge portion of the opening; and a dome-shaped bump containing Sn and Ti, formed in a region in the opening on the under bump metal layer, wherein an end portion of a boundary between the under bump metal layer and the bump is in contact with an inner wall of the opening portion in the insulating covering layer.
Public/Granted literature
- US09257402B2 Terminal structure, and semiconductor element and module substrate comprising the same Public/Granted day:2016-02-09
Information query
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