发明授权
US09224787B2 Method for fabricating nonvolatile memory device 有权
非易失性存储器件的制造方法

Method for fabricating nonvolatile memory device
摘要:
A method for fabricating a nonvolatile memory device is provided. The method includes forming a transistor including an impurity region formed in a substrate, forming a first interlayer insulation layer covering the transistor, the first interlayer insulation layer including a protrusion overlapping the impurity region, and forming an information storage unit on the protrusion, the information storage unit exposing side surfaces of the protrusion using point cusp magnetron-physical vapor deposition (PCM-PVD) and electrically connected to the impurity region.
公开/授权文献
信息查询
0/0