发明授权
- 专利标题: Method for fabricating nonvolatile memory device
- 专利标题(中): 非易失性存储器件的制造方法
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申请号: US14193877申请日: 2014-02-28
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公开(公告)号: US09224787B2公开(公告)日: 2015-12-29
- 发明人: Whan-Kyun Kim , Young-Hyun Kim , Woo-Jin Kim
- 申请人: Whan-Kyun Kim , Young-Hyun Kim , Woo-Jin Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, PA
- 优先权: KR10-2013-0024115 20130306
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/22 ; H01L43/12
摘要:
A method for fabricating a nonvolatile memory device is provided. The method includes forming a transistor including an impurity region formed in a substrate, forming a first interlayer insulation layer covering the transistor, the first interlayer insulation layer including a protrusion overlapping the impurity region, and forming an information storage unit on the protrusion, the information storage unit exposing side surfaces of the protrusion using point cusp magnetron-physical vapor deposition (PCM-PVD) and electrically connected to the impurity region.
公开/授权文献
- US20140256062A1 METHOD FOR FABRICATING NONVOLATILE MEMORY DEVICE 公开/授权日:2014-09-11
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