Invention Grant
US09230832B2 Method for manufacturing a filled cavity between a first and a second surface
有权
一种在第一和第二表面之间制造填充空腔的方法
- Patent Title: Method for manufacturing a filled cavity between a first and a second surface
- Patent Title (中): 一种在第一和第二表面之间制造填充空腔的方法
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Application No.: US14195077Application Date: 2014-03-03
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Publication No.: US09230832B2Publication Date: 2016-01-05
- Inventor: Thomas J. Brunschwiler , Stephan Paredes , Gerd Schlottig , Heiko Wolf
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent Jeff Tang
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/02 ; H01L23/488 ; H01L21/56 ; H01L23/00

Abstract:
A method for manufacturing a filled cavity between a first surface and a second surface. The steps of the method include: providing a first surface and a second surface; applying on the first surface and/or the second surface a filling material that has a carrier fluid and necking particles; providing spacer elements for defining a width of a cavity between the first and second surfaces; bringing the first and second surfaces together to deform the filling material such that at least one spacer element is held between the first and second surfaces; and removing the carrier fluid such that necking particles attach in a contact region of at least one spacer element with the first surface or the second surface to form necks.
Public/Granted literature
- US20150249022A1 METHOD FOR MANUFACTURING A FILLED CAVITY BETWEEN A FIRST AND A SECOND SURFACE Public/Granted day:2015-09-03
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