A temperature compensation apparatus may include a sense circuit configured to produce a sense voltage that is dependent on temperature and a temperature compensation circuit configured to receive the sense voltage and produce a temperature compensation control signal to control a compensation capacitor array of an oscillator. The temperature compensation circuit may be configured to calibrate the control signal to have a first value at a first temperature. The temperature compensation circuit may also be configured to calibrate a trimming level (e.g., slope) of the control signal.