Invention Grant
- Patent Title: System and method for miniaturization of synthetic jets
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Application No.: US14509183Application Date: 2014-10-08
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Publication No.: US09233838B2Publication Date: 2016-01-12
- Inventor: Mehmet Arik , Stanton Earl Weaver
- Applicant: General Electric Company
- Applicant Address: US NY Schenectady
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Schenectady
- Agency: Ziolkowski Patent Solutions Group, SC
- Agent Jean K. Testa
- Main IPC: F04B17/03
- IPC: F04B17/03 ; B81B7/00 ; F04B45/047 ; H01L23/467 ; B81C1/00 ; H01L41/09

Abstract:
A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
Public/Granted literature
- US20150021410A1 SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS Public/Granted day:2015-01-22
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