Invention Grant
- Patent Title: MEMS acoustic transducer and method for fabricating the same
- Patent Title (中): MEMS声学传感器及其制造方法
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Application No.: US13661690Application Date: 2012-10-26
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Publication No.: US09236275B2Publication Date: 2016-01-12
- Inventor: Chien-Nan Yeh , Chin-Hung Wang , Hsin-Li Lee , Jien-Ming Chen , Tzong-Che Ho , Li-Chi Pan
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW100144117A 20111201; TW101120613A 20120608
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/56 ; B81B7/00 ; H04R31/00 ; H04R19/00

Abstract:
A MEMS acoustic transducer is provided, which includes a substrate, a MEMS chip, and a housing. The substrate has a first opening area and a lower electrode layer disposed over a surface of the substrate, wherein the first opening area includes at least one hole allowing acoustic pressure to enter the MEMS acoustic transducer. The MEMS chip is disposed over the surface of the substrate, including a second opening area and an upper electrode layer partially sealing the second opening area, wherein the upper electrode layer and the lower electrode layer, which are parallel to each other and have a gap therebetween, form an induction capacitor. The housing is disposed over the MEMS chip or the surface of the substrate creating a cavity with the MEMS chip or the substrate. In addition, a method for fabricating the above MEMS acoustic transducer is also provided.
Public/Granted literature
- US20130140655A1 MEMS ACOUSTIC TRANSDUCER AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-06-06
Information query
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