Invention Grant
- Patent Title: Micro electro mechanical systems sensor module package and method of manufacturing the same
- Patent Title (中): 微机电系统传感器模块封装及其制造方法相同
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Application No.: US14188161Application Date: 2014-02-24
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Publication No.: US09236286B2Publication Date: 2016-01-12
- Inventor: Tae Hyun Kim , Heung Woo Park
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2013-0148483 20131202
- Main IPC: G01R33/02
- IPC: G01R33/02 ; H01L21/70 ; G01P15/08 ; G01C19/5769

Abstract:
Disclosed herein is a MEMS sensor module package. The MEMS sensor module package according to a preferred embodiment of the present invention includes: a printed circuit board (PCB); an application specific integrated circuit (ASIC) stacked on the PCB, one side of the ASIC being wire-bonded to the PCB; a MEMS sensor stacked on the ASIC; and a molding encapsulating the MEMS sensor and the ASIC with a resin. Accordingly, the electrical connection distance between a MEMS sensor and an ASIC is shortened so that electrical characteristic may be improved. Further, a sensor module package may be implemented in an ASIC size, so that size reduction may be achieved to meet the requirements of mobile devices.
Public/Granted literature
- US20150153372A1 MICRO ELECTRO MECHANICAL SYSTEMS SENSOR MODULE PACKAGE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-06-04
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