Invention Grant
US09236299B2 Methods of forming a metal cap layer on copper-based conductive structures on an integrated circuit device
有权
在集成电路器件上的铜基导电结构上形成金属覆盖层的方法
- Patent Title: Methods of forming a metal cap layer on copper-based conductive structures on an integrated circuit device
- Patent Title (中): 在集成电路器件上的铜基导电结构上形成金属覆盖层的方法
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Application No.: US14201255Application Date: 2014-03-07
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Publication No.: US09236299B2Publication Date: 2016-01-12
- Inventor: Xunyuan Zhang , Hoon Kim , Christian Witt , Larry Zhao
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L21/306

Abstract:
One method includes forming a barrier layer in a trench/opening in an insulating material, forming a first region of a copper material above the barrier layer, forming a metal layer in the trench/opening on the first region of copper material, forming a second region of copper material on the metal layer, performing at least one CMP process to remove any materials positioned above a planarized upper surface of the layer of insulating material outside of the trench/opening so as to thereby define a structure comprised of the metal layer positioned between the first and second regions of copper material, forming a dielectric cap layer above the layer of insulating material and above the structure, and performing a metal diffusion anneal process to form a metal cap layer adjacent at least the upper surface of a conductive copper structure.
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