Invention Grant
- Patent Title: Passive devices for FinFET integrated circuit technologies
- Patent Title (中): FinFET集成电路技术的无源器件
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Application No.: US14513709Application Date: 2014-10-14
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Publication No.: US09236398B2Publication Date: 2016-01-12
- Inventor: William F. Clark, Jr. , Robert J. Gauthier, Jr. , Terence B. Hook , Junjun Li , Theodorus E. Standaert , Thomas A. Wallner
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony J. Canale
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/338 ; H01L27/12 ; H01L29/78 ; H01L21/84 ; H01L21/8238 ; H01L27/02 ; H01L21/762 ; H01L27/092

Abstract:
Device structures and design structures for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A device region is formed in a trench and is coupled with a handle wafer of a semiconductor-on-insulator substrate. The device region extends through a buried insulator layer of the semiconductor-on-insulator substrate toward a top surface of a device layer of the semiconductor-on-insulator substrate. The device region is comprised of lightly-doped semiconductor material. The device structure further includes a doped region formed in the device region and that defines a junction. A portion of the device region is laterally positioned between the doped region and the buried insulator layer of the semiconductor-on-insulator substrate. Another region of the device layer may be patterned to form fins for fin-type field-effect transistors.
Public/Granted literature
- US20150054027A1 PASSIVE DEVICES FOR FINFET INTEGRATED CIRCUIT TECHNOLOGIES Public/Granted day:2015-02-26
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