Invention Grant
- Patent Title: Method and apparatus for forming a transparent conductive oxide using hydrogen
- Patent Title (中): 使用氢形成透明导电氧化物的方法和装置
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Application No.: US13785495Application Date: 2013-03-05
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Publication No.: US09236523B2Publication Date: 2016-01-12
- Inventor: Benyamin Buller , Markus Gloeckler , David Hwang , Rui Shao , Zhibo Zhao
- Applicant: FIRST SOLAR, INC
- Applicant Address: US OH Perrysburg
- Assignee: FIRST SOLAR, INC
- Current Assignee: FIRST SOLAR, INC
- Current Assignee Address: US OH Perrysburg
- Agency: Dickstein Shapiro LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; C23C14/08 ; C23C14/58 ; H01L31/073 ; H01L31/0224 ; H01L31/0392
Abstract:
A method and apparatus for forming a crystalline cadmium stannate layer of a photovoltaic device by heating an amorphous layer in the presence of hydrogen gas.
Public/Granted literature
- US20130230945A1 METHOD AND APPARATUS FOR FORMING A TRANSPARENT CONDUCTIVE OXIDE USING HYDROGEN Public/Granted day:2013-09-05
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