Invention Grant
US09240331B2 Semiconductor device and method of making bumpless flipchip interconnect structures
有权
半导体器件和制造无凸块的倒装芯片互连结构的方法
- Patent Title: Semiconductor device and method of making bumpless flipchip interconnect structures
- Patent Title (中): 半导体器件和制造无凸块的倒装芯片互连结构的方法
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Application No.: US14039418Application Date: 2013-09-27
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Publication No.: US09240331B2Publication Date: 2016-01-19
- Inventor: KyungMoon Kim , KooHong Lee , JaeHak Yee , YoungChul Kim , Lan Hoang , Pandi C. Marimuthu , Steve Anderson , See Chian Lim , HeeJo Chi
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L29/40 ; H01L21/48 ; H01L23/00 ; H01L23/498

Abstract:
A semiconductor device includes a substrate with contact pads. A mask is disposed over the substrate. Aluminum-wettable conductive paste is printed over the contact pads of the substrate. A semiconductor die is disposed over the aluminum-wettable conductive paste. The aluminum-wettable conductive paste is reflowed to form an interconnect structure over the contact pads of the substrate. The contact pads include aluminum. Contact pads of the semiconductor die are disposed over the aluminum-wettable conductive paste. The aluminum-wettable conductive paste is reflowed to form an interconnect structure between the contact pads of the semiconductor die and the contact pads of the substrate. The interconnect structure is formed directly on the contact pads of the substrate and semiconductor die. The contact pads of the semiconductor die are etched prior to reflowing the aluminum-wettable conductive paste. An epoxy pre-dot to maintain a separation between the semiconductor die and substrate.
Public/Granted literature
- US20140175661A1 Semiconductor Device and Method of Making Bumpless Flipchip Interconnect Structures Public/Granted day:2014-06-26
Information query
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