Invention Grant
US09245661B2 Conductive film with doped layers, method for producing the same, and array substrate comprising the same 有权
具有掺杂层的导电膜,其制造方法和包括该导电膜的阵列基板

Conductive film with doped layers, method for producing the same, and array substrate comprising the same
Abstract:
A conductive film, a method for producing the same and an array substrate comprising the same are provided, so that copper atoms can be efficiently prevented from diffusing into an adjacent semiconductor layer or interlaminated insulation film. The conductive film comprises a base film made of copper or copper alloy, in which hydrogen and/or carbon atoms are distributed.
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