Invention Grant
- Patent Title: Liquid treatment apparatus and liquid treatment method
- Patent Title (中): 液体处理装置及液体处理方法
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Application No.: US14234493Application Date: 2012-10-11
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Publication No.: US09245737B2Publication Date: 2016-01-26
- Inventor: Kazuhiro Aiura , Norihiro Itoh
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2011-225974 20111013
- International Application: PCT/JP2012/076302 WO 20121011
- International Announcement: WO2013/054838 WO 20130418
- Main IPC: H01L21/461
- IPC: H01L21/461 ; H01L21/02 ; H01L21/67 ; H01L21/306

Abstract:
The liquid treatment apparatus according to the present invention includes a substrate holder configured to horizontally hold a substrate, and a top plate configured to be rotatable and to cover the substrate held by the substrate holder from above so as to define a treatment space. In the treatment space, a chemical liquid is supplied by a chemical liquid nozzle onto the substrate, and an atmosphere replacement gas is supplied by a replacement nozzle into the treatment space. The replacement nozzle is supported by a replacement nozzle support arm configured to be horizontally moved between an advanced position at which the replacement nozzle support arm is advanced into the treatment space and a retracted position at which the replacement nozzle support arm is retracted outside from the treatment space. The replacement nozzle is configured to discharge, above the substrate, the atmosphere replacement gas upward.
Public/Granted literature
- US20140248774A1 LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD Public/Granted day:2014-09-04
Information query
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