Invention Grant
- Patent Title: Unequal link SCARA arm
- Patent Title (中): 不平等的链接SCARA手臂
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Application No.: US11179762Application Date: 2005-07-11
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Publication No.: US09248568B2Publication Date: 2016-02-02
- Inventor: Robert T. Caveney , David Martin , Ulysses Gilchrist
- Applicant: Robert T. Caveney , David Martin , Ulysses Gilchrist
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B66C23/00
- IPC: B66C23/00 ; B25J9/04 ; H01L21/677

Abstract:
A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
Public/Granted literature
- US20070020082A1 Unequal link SCARA arm Public/Granted day:2007-01-25
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