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公开(公告)号：US09248568B2
公开(公告)日：2016-02-02
申请号：US11179762
申请日：2005-07-11
IPC分类号： B66C23/00 , B25J9/04 , H01L21/677
CPC分类号： B25J9/042 , H01L21/67766
摘要： A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
摘要翻译： 一种基板输送装置，包括驱动部，控制器，上臂，前臂和基板支架。 上臂的近端在肩关节处可旋转地安装到驱动部。 前臂的近端以肘关节可旋转地安装在上臂的远端。 基体保持器可旋转地安装在腕关节前端的前端。 上臂和前臂从关节中心到关节中心的长度不等。 基板输送臂适于将基板输送至至少两个基板保持区域，并且与传送装置的驱动部分相对于保持区域保持固定位置。 上臂，前臂和基底保持架中的每一个可独立地相对于彼此旋转。
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公开(公告)号：US20120128450A1
公开(公告)日：2012-05-24
申请号：US13270844
申请日：2011-10-11
IPC分类号： H01L21/677
CPC分类号： B25J9/042 , H01L21/67742
摘要： A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus.
摘要翻译： 一种机器人运输装置，其包括驱动系统，该驱动系统包括至少一个谐波马达组件，耦合到所述至少一个谐波马达组件的至少一个驱动轴，安装在所述至少一个驱动轴上的至少一个机器臂， 位于密封环境内，以及至少一个大气隔离密封件，其位于驱动系统的输出表面上并形成大气障碍物，其设置成使得至少一个驱动轴延伸穿过大气屏障进入密封环境，并且至少一个 谐波电动机组件位于密封环境之外，其中机器人运输装置是高容量有效载荷运输装置。
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公开(公告)号：US07607879B2
公开(公告)日：2009-10-27
申请号：US11154787
申请日：2005-06-15
申请人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Robert T. Caveney , Ulysses Gilchrist , Jeff G. Araujo
发明人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Robert T. Caveney , Ulysses Gilchrist , Jeff G. Araujo
IPC分类号： B65G49/07
CPC分类号： H01L21/67196 , Y10S414/135
摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.
摘要翻译： 一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。 外壳连接到框架。 存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。 基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。 框架包括可移动部分。 可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。 基板输送装置可从许多不同的可互换的基板输送装置中选择。 每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。 每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。
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公开(公告)号：US09656386B2
公开(公告)日：2017-05-23
申请号：US13270844
申请日：2011-10-11
IPC分类号： B25J9/04 , H01L21/677
CPC分类号： B25J9/042 , H01L21/67742
摘要： A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus.
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公开(公告)号：US08918203B2
公开(公告)日：2014-12-23
申请号：US13417837
申请日：2012-03-12
IPC分类号： G06F7/00 , B25J9/04 , H01L21/677
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译： 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。
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公开(公告)号：US20120232690A1
公开(公告)日：2012-09-13
申请号：US13417837
申请日：2012-03-12
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译： 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。
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公开(公告)号：US07988398B2
公开(公告)日：2011-08-02
申请号：US10962787
申请日：2004-10-09
IPC分类号： H01L21/677 , H01L21/306 , B65H1/00 , C23F1/00
CPC分类号： H01L21/677 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside atmosphere. Each process module of the array is communicably connected to the chamber to allow a substrate to be transferred between the chamber and process module. The substrate transport is located in and is movably supported from the chamber. The transport is capable of moving along a linear path defined by the chamber for transporting the substrate between process modules. The drive system is connected to the chamber for driving and moving the transport along the linear path. The chamber comprises a selectable number of chamber modules serially abutted to defined the chamber. Each module has an integral portion of the drive system.
摘要翻译： 具有室的基板处理装置，大致线性的工艺模块阵列，基板输送和驱动系统。 该室能够与外界气氛隔绝。 阵列的每个处理模块可通信地连接到腔室，以允许衬底在室和过程模块之间传送。 衬底输送器位于腔室中并且可移动地从腔室支撑。 输送器能够沿着由腔室限定的线性路径移动，以在处理模块之间传送基板。 驱动系统连接到室，用于沿着线性路径驱动和移动传送装置。 腔室包括可选数量的腔室模块，其串联地邻接以限定腔室。 每个模块都具有驱动系统的整体部分。
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公开(公告)号：US20110038692A1
公开(公告)日：2011-02-17
申请号：US12542588
申请日：2009-08-17
IPC分类号： H01L21/673 , H01L21/677 , H01L21/67
CPC分类号： H01L21/67742 , H01L21/67196
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
摘要翻译： 一种具有第一室，运输车辆和另一室的半导体工件处理设备。 第一个房间能够与外界气氛隔绝。 运输车辆位于第一室中，并且可从第一室移动地支撑，用于相对于第一室线性运动。 运输车辆包括基座和可移动地安装到基座并且能够相对于基座进行多通道移动的整体半导体工件传送臂。 另一个室通过第一室的可关闭的开口可通信地连接到第一室。 开口的尺寸设计成允许运输车辆通过开口在第一室和另一个室之间转运。
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公开(公告)号：US20120141235A1
公开(公告)日：2012-06-07
申请号：US13293717
申请日：2011-11-10
IPC分类号： H01L21/677
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。
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公开(公告)号：US20080298944A1
公开(公告)日：2008-12-04
申请号：US12117355
申请日：2008-05-08
IPC分类号： B66C23/00
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。
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