发明授权
- 专利标题: Systems and methods of automatic boundary control for semiconductor processes
- 专利标题(中): 半导体工艺自动边界控制系统和方法
-
申请号: US13311601申请日: 2011-12-06
-
公开(公告)号: US09250619B2公开(公告)日: 2016-02-02
- 发明人: Chih-Wei Hsu , Mei-Jen Wu , Yen-Di Tsen , Jo Fei Wang , Jong-I Mou , Chin-Hsiang Lin
- 申请人: Chih-Wei Hsu , Mei-Jen Wu , Yen-Di Tsen , Jo Fei Wang , Jong-I Mou , Chin-Hsiang Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G05B19/18 ; H01L21/66
摘要:
A system and method of automatically calculating boundaries for a semiconductor fabrication process. The method includes selecting a first parameter for monitoring during a semiconductor fabrication process. A first set of values for the first parameter are received and a group value of the first set is determined. Each value in the first set of values is normalized. A first weighting factor is selected based on a number of values in the first set. The embodiment also includes generating a first and a second boundary value as a function of the weighting factor, the first set normalized values and the group value of the first set and applying the first and second boundary values to control the semiconductor fabrication process.
公开/授权文献
信息查询