发明授权
US09250619B2 Systems and methods of automatic boundary control for semiconductor processes 有权
半导体工艺自动边界控制系统和方法

Systems and methods of automatic boundary control for semiconductor processes
摘要:
A system and method of automatically calculating boundaries for a semiconductor fabrication process. The method includes selecting a first parameter for monitoring during a semiconductor fabrication process. A first set of values for the first parameter are received and a group value of the first set is determined. Each value in the first set of values is normalized. A first weighting factor is selected based on a number of values in the first set. The embodiment also includes generating a first and a second boundary value as a function of the weighting factor, the first set normalized values and the group value of the first set and applying the first and second boundary values to control the semiconductor fabrication process.
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