Invention Grant
- Patent Title: Developing method for developing apparatus
- Patent Title (中): 显影装置的开发方法
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Application No.: US14452929Application Date: 2014-08-06
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Publication No.: US09256131B2Publication Date: 2016-02-09
- Inventor: Hirofumi Takeguchi , Taro Yamamoto , Kousuke Yoshihara
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2008-157560 20080617
- Main IPC: G03F7/16
- IPC: G03F7/16 ; G03F7/30

Abstract:
A developing method including a developing step in which, while a wafer horizontally held by a spin chuck is being rotated, the wafer is developed by supplying a developer onto a surface of the wafer, wherein provided before the developing step is a pre-wetting step in which, simultaneously with the developer being supplied from a first nozzle that is located on a position near a central part of the surface of the rotating wafer, a deionized water as a second liquid is supplied from a second nozzle that is located on a position nearer to an outer peripheral part of the wafer than the first nozzle, to thereby spread out the developer in the rotating direction of the wafer by a wall that is formed by the deionized water flowing to the outer peripheral side of the wafer with the rotation of the wafer.
Public/Granted literature
- US20140347639A1 DEVELOPING METHOD FOR DEVELOPING APPARATUS Public/Granted day:2014-11-27
Information query
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