发明授权
US09261669B2 Vibrating element having meandering shape, and optical reflection element
有权
具有曲折形状的振动元件和光学反射元件
- 专利标题: Vibrating element having meandering shape, and optical reflection element
- 专利标题(中): 具有曲折形状的振动元件和光学反射元件
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申请号: US13978386申请日: 2012-02-16
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公开(公告)号: US09261669B2公开(公告)日: 2016-02-16
- 发明人: Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
- 申请人: Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
- 申请人地址: JP Osaka
- 专利权人: Panasonic Intellectual Property Management Co., Ltd.
- 当前专利权人: Panasonic Intellectual Property Management Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2011-031586 20110217
- 国际申请: PCT/JP2012/001015 WO 20120216
- 国际公布: WO2012/111332 WO 20120823
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G02B7/182 ; G02B26/08 ; H02N2/10 ; B81B3/00 ; H01L41/08 ; H01L41/09
摘要:
A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
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