Invention Grant
US09263555B2 Methods of forming a channel region for a semiconductor device by performing a triple cladding process
有权
通过执行三重包层工艺形成用于半导体器件的沟道区域的方法
- Patent Title: Methods of forming a channel region for a semiconductor device by performing a triple cladding process
- Patent Title (中): 通过执行三重包层工艺形成用于半导体器件的沟道区域的方法
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Application No.: US14322987Application Date: 2014-07-03
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Publication No.: US09263555B2Publication Date: 2016-02-16
- Inventor: Bartlomiej Jan Pawlak , Behtash Behin-Aein , Mehdi Salmani-Jelodar
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/02

Abstract:
One illustrative method disclosed herein includes, among other things, forming a plurality of trenches that define a fin, performing a plurality of epitaxial deposition processes to form first, second and third layers of epi semiconductor material around an exposed portion of the fin, removing the first, second and third layers of epi semiconductor material from above an upper surface of the fin so as to thereby expose the fin, selectively removing the fin relative to the first, second and third layers of epi semiconductor material so as to thereby define two fin structures comprised of the first, second and third layers of epi semiconductor material, and forming a gate structure around a portion of at least one of the fin structures comprised of the first, second and third layers of epi semiconductor material.
Public/Granted literature
- US20160005834A1 METHODS OF FORMING A CHANNEL REGION FOR A SEMICONDUCTOR DEVICE BY PERFORMING A TRIPLE CLADDING PROCESS Public/Granted day:2016-01-07
Information query
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