Invention Grant
US09263782B2 Notch filter structure with open stubs in semiconductor substrate and design structure 有权
半导体衬底开口短路的陷波滤波器结构和设计结构

Notch filter structure with open stubs in semiconductor substrate and design structure
Abstract:
On-chip millimeter wave (mmW) notch filters with via stubs, methods of manufacture and design structures are disclosed. The notch filter includes a signal line comprising a metal trace line connected to a metal via stub partially extending into a semiconductor substrate. The notch filter further includes a defected ground plane connected to at least one or more additional metal via stubs partially extending into the semiconductor substrate.
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