Invention Grant
US09276118B2 FinFET device having a merge source drain region under contact areas and unmerged fins between contact areas, and a method of manufacturing same
有权
FinFET器件具有接触区域下方的合并源极漏极区域和接触区域之间的非熔接鳍片及其制造方法
- Patent Title: FinFET device having a merge source drain region under contact areas and unmerged fins between contact areas, and a method of manufacturing same
- Patent Title (中): FinFET器件具有接触区域下方的合并源极漏极区域和接触区域之间的非熔接鳍片及其制造方法
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Application No.: US14640851Application Date: 2015-03-06
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Publication No.: US09276118B2Publication Date: 2016-03-01
- Inventor: Pranita Kerber , Qiqing C. Ouyang , Alexander Reznicek
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Agent Frank Digiglio
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L29/78 ; H01L29/66 ; H01L29/08

Abstract:
A method for manufacturing a fin field-effect transistor (FinFET) device, comprises forming a plurality of fins on a substrate, forming a plurality of gate regions on portions of the fins, wherein the gate regions are spaced apart from each other, forming spacers on each respective gate region, epitaxially growing a first epitaxy region on each of the fins, stopping growth of the first epitaxy regions prior to merging of the first epitaxy regions between adjacent fins, forming a dielectric layer on the substrate including the fins and first epitaxy regions, removing the dielectric layer and first epitaxy regions from the fins at one or more portions between adjacent gate regions to form one or more contact area trenches, and epitaxially growing a second epitaxy region on each of the fins in the one or more contact area trenches, wherein the second epitaxy regions on adjacent fins merge with each other.
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