Invention Grant
- Patent Title: Gas enclosure systems and methods utilizing multi-zone circulation and filtration
- Patent Title (中): 采用多区循环和过滤的气体封闭系统和方法
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Application No.: US14801653Application Date: 2015-07-16
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Publication No.: US09278564B2Publication Date: 2016-03-08
- Inventor: Justin Mauck , Alexander Sou-Kang Ko , Eliyahu Vronsky , Prahallad Iyengar , Digby Pun
- Applicant: Kateeva, Inc.
- Applicant Address: US CA Newark
- Assignee: Kateeva, Inc.
- Current Assignee: Kateeva, Inc.
- Current Assignee Address: US CA Newark
- Main IPC: B41J29/13
- IPC: B41J29/13 ; B41J29/06

Abstract:
The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.
Public/Granted literature
- US20160016423A1 Gas Enclosure Systems and Methods Utilizing Multi-Zone Circulation and Filtration Public/Granted day:2016-01-21
Information query
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