PRINTER, METHOD OF OPERATING PRINTER, AND SUBSTRATE HANDLING MECHANISM

    公开(公告)号:US20220274425A1

    公开(公告)日:2022-09-01

    申请号:US17663778

    申请日:2022-05-17

    申请人: Kateeva, Inc.

    摘要: A printer includes a substrate support, a printhead assembly, first and second actuators, and a controller. The printhead assembly deposits material on a substrate supported on the substrate support. The first actuator is disposed at a side of the substrate support and coupled to a first linear track disposed along the side of the substrate support and oriented in a first direction. The second actuator is disposed at an end of the substrate support and coupled to a second linear track disposed along the end of the substrate support and oriented in a second direction perpendicular to the first direction. The first and second actuators are positioned to engage with the substrate simultaneously. The controller moves the first and second actuators together to rotate the substrate.

    SYSTEMS AND METHODS FOR SUPPORTING AND CONVEYING A SUBSTRATE

    公开(公告)号:US20220181596A1

    公开(公告)日:2022-06-09

    申请号:US17647410

    申请日:2022-01-07

    申请人: KATEEVA, INC.

    IPC分类号: H01L51/56 B05C13/00 H01L51/00

    摘要: A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.

    Manufacturing enclosure environmental containment systems and methods

    公开(公告)号:US11331700B2

    公开(公告)日:2022-05-17

    申请号:US16483243

    申请日:2018-04-10

    申请人: KATEEVA, INC.

    摘要: What is disclosed herein are embodiments of an enclosed manufacturing system configured to provide a controlled process environment for various articles of manufacture requiring a controlled process environment, and additionally to contain a process environment within the enclosure during periods of external access to the interior of the enclosed manufacturing system. Various embodiments of manufacturing systems of the present teaching can contain the environment within a manufacturing enclosure so as to minimize the interaction of an environment external to a manufacturing enclosure with the internal enclosure environment.

    GUIDED TRANSPORT PATH CORRECTION
    10.
    发明申请

    公开(公告)号:US20220039265A1

    公开(公告)日:2022-02-03

    申请号:US17444796

    申请日:2021-08-10

    申请人: Kateeva, Inc.

    摘要: A printer deposits material onto a substrate as part of a manufacturing process for an electronic product; at least one transported component experiences error, which affects the deposition. This error is mitigated using transducers that equalize position of the component, e.g., to provide an “ideal” conveyance path, thereby permitting precise droplet placement notwithstanding the error. In one embodiment, an optical guide (e.g., using a laser) is used to define a desired path; sensors mounted to the component dynamically detect deviation from this path, with this deviation then being used to drive the transducers to immediately counteract the deviation. This error correction scheme can be applied to correct for more than type of transport error, for example, to correct for error in a substrate transport path, a printhead transport path and/or split-axis transport non-orthogonality.