发明授权
US09278857B2 Method of surface tension control to reduce trapped gas bubbles 有权
表面张力控制方法,以减少被困的气泡

Method of surface tension control to reduce trapped gas bubbles
摘要:
The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.
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