发明授权
- 专利标题: Method of surface tension control to reduce trapped gas bubbles
- 专利标题(中): 表面张力控制方法,以减少被困的气泡
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申请号: US13362972申请日: 2012-01-31
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公开(公告)号: US09278857B2公开(公告)日: 2016-03-08
- 发明人: Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
- 申请人: Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
- 申请人地址: US CA Cupertino
- 专利权人: Seagate Technology Inc.
- 当前专利权人: Seagate Technology Inc.
- 当前专利权人地址: US CA Cupertino
- 主分类号: B82Y40/00
- IPC分类号: B82Y40/00 ; G03F7/00 ; B82Y10/00 ; B05D3/12 ; B05D3/10
摘要:
The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.