发明授权
- 专利标题: Multi coil target design
- 专利标题(中): 多线圈目标设计
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申请号: US13366805申请日: 2012-02-06
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公开(公告)号: US09279179B2公开(公告)日: 2016-03-08
- 发明人: Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
- 申请人: Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Associates, LLC
- 主分类号: C23C14/35
- IPC分类号: C23C14/35 ; H05H1/46 ; H01J37/32 ; H01J37/34
摘要:
In some embodiments, the present disclosure relates to a plasma processing system configured to form a symmetric plasma distribution around a workpiece. In some embodiments, the plasma processing system comprises a plurality of coils symmetrically positioned around a processing chamber. When a current is provided to the coils, separate magnetic fields, which operate to ionize the target atoms, emanate from the separate coils. The separate magnetic fields operate upon ions within the coils to form a plasma on the interior of the coils. Furthermore, the separate magnetic fields are superimposed upon one another between coils to form a plasma on the exterior of the coils. Therefore, the disclosed plasma processing system can form a plasma that continuously extends along a perimeter of the workpiece with a high degree of uniformity (i.e., without dead spaces).
公开/授权文献
- US20130199926A1 Novel Multi Coil Target Design 公开/授权日:2013-08-08
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