Invention Grant
- Patent Title: Multi coil target design
- Patent Title (中): 多线圈目标设计
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Application No.: US13366805Application Date: 2012-02-06
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Publication No.: US09279179B2Publication Date: 2016-03-08
- Inventor: Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
- Applicant: Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H05H1/46 ; H01J37/32 ; H01J37/34

Abstract:
In some embodiments, the present disclosure relates to a plasma processing system configured to form a symmetric plasma distribution around a workpiece. In some embodiments, the plasma processing system comprises a plurality of coils symmetrically positioned around a processing chamber. When a current is provided to the coils, separate magnetic fields, which operate to ionize the target atoms, emanate from the separate coils. The separate magnetic fields operate upon ions within the coils to form a plasma on the interior of the coils. Furthermore, the separate magnetic fields are superimposed upon one another between coils to form a plasma on the exterior of the coils. Therefore, the disclosed plasma processing system can form a plasma that continuously extends along a perimeter of the workpiece with a high degree of uniformity (i.e., without dead spaces).
Public/Granted literature
- US20130199926A1 Novel Multi Coil Target Design Public/Granted day:2013-08-08
Information query
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