发明授权
- 专利标题： Apparatus for manufacturing a hierarchical structure
- 专利标题（中）： 用于制造分层结构的装置
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申请号： US13122240申请日： 2009-09-28
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公开(公告)号： US09281230B2公开(公告)日： 2016-03-08
- 发明人: Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Seung-Woo Han , Byung-Ik Choi
- 申请人： Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Seung-Woo Han , Byung-Ik Choi
- 申请人地址： KR Daejeon
- 专利权人： KOREA INSTITUTE OF MACHINERY & MATERIALS
- 当前专利权人： KOREA INSTITUTE OF MACHINERY & MATERIALS
- 当前专利权人地址： KR Daejeon
- 代理机构： Pearl Cohen Zedek Latzer Baratz LLP
- 优先权： KR10-2008-0096815 20081001
- 国际申请： PCT/KR2009/005527 WO 20090928
- 国际公布： WO2010/038963 WO 20100408
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; B29C43/46 ; B29C43/48 ; B29C47/06 ; B32B27/00 ; H01L23/02 ; B29L9/00 ; H01L23/00 ; H01L25/065
摘要：
The present invention relates to an apparatus for massive manufacturing a hierarchical structure that can hierarchically form high performance micro units one a flexible substrate. For this purpose, an apparatus for manufacturing a hierarchical structure according to the present invention is provided to layer micro units provided on a dummy substrate that is made of a hard material on a target substrate that is made of a flexible material by releasing the micro units from the dummy substrate. The apparatus includes: a transfer stage flat-transferring the dummy substrate by supporting the same and a main roller rolling the target substrate by winding the same as the transfer stage proceeds and layering the micro unit of the dummy substrate on the target substrate.
公开/授权文献
- US20120118506A1 APPARATUS FOR MANUFACTURING A HIERARCHICAL STRUCTURE 公开/授权日：2012-05-17
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