发明授权
- 专利标题： Rotatable heating-cooling plate and element in proximity thereto
- 专利标题（中）： 可旋转的加热冷却板和靠近其的元件
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申请号： US12686276申请日： 2010-01-12
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公开(公告)号： US09282592B2公开(公告)日： 2016-03-08
- 发明人: Jui-Chun Peng , Jacky Chung , Heng-Hsin Liu , Chun-Hung Lin
- 申请人： Jui-Chun Peng , Jacky Chung , Heng-Hsin Liu , Chun-Hung Lin
- 申请人地址： TW
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址： TW
- 代理机构： Hauptman Ham, LLP
- 主分类号： H05B3/68
- IPC分类号： H05B3/68 ; H01L21/67 ; H01L21/68 ; H05B3/14 ; H05B1/02
摘要：
An apparatus for selectively heating/cooling one or more substrates and establishing an approximately uniform temperature in the one or more substrates during a heating or cooling event is described. In one embodiment, the apparatus comprises a rotatable hot/cold plate onto which the one or more substrates are placed and a heating/cooling element disposed in close proximity to the rotatable hot/cold plate for selectively elevating/lowering the temperature of the one or more substrates.
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