Invention Grant
US09297825B2 Tilt mode accelerometer with improved offset and noise performance
有权
倾斜模式加速度计具有改善的偏移和噪声性能
- Patent Title: Tilt mode accelerometer with improved offset and noise performance
- Patent Title (中): 倾斜模式加速度计具有改善的偏移和噪声性能
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Application No.: US13785624Application Date: 2013-03-05
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Publication No.: US09297825B2Publication Date: 2016-03-29
- Inventor: Xin Zhang , Howard R. Samuels , Michael W. Judy
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.
Public/Granted literature
- US20140251011A1 Tilt Mode Accelerometer with improved Offset and Noise Performance Public/Granted day:2014-09-11
Information query
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