Invention Grant
- Patent Title: Apparatuses and methods including magnetic layer oxidation
- Patent Title (中): 包括磁层氧化的设备和方法
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Application No.: US14062776Application Date: 2013-10-24
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Publication No.: US09299380B2Publication Date: 2016-03-29
- Inventor: Michael R. Feldbaum , Koichi Wago , Bin Lu , David S. Kuo
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: B44C1/22
- IPC: B44C1/22 ; G11B5/74 ; G11B5/855 ; H01F41/34 ; H01F10/12
Abstract:
Provided herein is a method including oxidizing tops of features of a patterned magnetic layer to form oxidized tops of the features; removing an excess of an applied first protective material down to at least the oxidized tops of the features to form a planarized layer; and applying a second protective material over the planarized layer.
Public/Granted literature
- US20150017483A1 METHOD OF FABRICATION OF AN ANISOTROPY MAGNETIC LAYER OF A PATTERNED STACK Public/Granted day:2015-01-15
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