Invention Grant
US09299697B2 High breakdown voltage microelectronic device isolation structure with improved reliability
有权
高击穿电压微电子器件隔离结构具有改进的可靠性
- Patent Title: High breakdown voltage microelectronic device isolation structure with improved reliability
- Patent Title (中): 高击穿电压微电子器件隔离结构具有改进的可靠性
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Application No.: US14277851Application Date: 2014-05-15
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Publication No.: US09299697B2Publication Date: 2016-03-29
- Inventor: Jeffrey Alan West , Thomas D. Bonifield , Byron Lovell Williams
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Frank D. Cimino
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/78 ; H01L21/02 ; H01L29/66 ; H01L49/02 ; H01L29/06 ; H01L21/8234

Abstract:
A microelectronic device contains a high voltage component having a high voltage node and a low voltage node. The high voltage node is isolated from the low voltage node by a main dielectric between the high voltage node and low voltage elements at a surface of the substrate of the microelectronic device. A lower-bandgap dielectric layer is disposed between the high voltage node and the main dielectric. The lower-bandgap dielectric layer contains at least one sub-layer with a bandgap energy less than a bandgap energy of the main dielectric. The lower-bandgap dielectric layer extends beyond the high voltage node continuously around the high voltage node. The lower-bandgap dielectric layer has an isolation break surrounding the high voltage node at a distance of at least twice the thickness of the lower-bandgap dielectric layer from the high voltage node.
Public/Granted literature
- US20150333055A1 HIGH BREAKDOWN VOLTAGE MICROELECTRONIC DEVICE ISOLATION STRUCTURE WITH IMPROVED RELIABILITY Public/Granted day:2015-11-19
Information query
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