- Patent Title: Electrical coupling of memory cell access devices to a word line
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Application No.: US14036447Application Date: 2013-09-25
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Publication No.: US09299804B2Publication Date: 2016-03-29
- Inventor: Chung H. Lam , Jing Li , Edward W. Kiewra
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L29/66 ; H01L27/22 ; H01L27/24 ; G11C13/00

Abstract:
A memory array and a method for electrically coupling memory cell access devices to a word line. The memory array includes a source line electrically coupled to each source terminal of the memory cell access devices. The memory array also includes a first set of at least two vertical pillars positioned above and electrically coupled to the source line. A second set of vertical pillars electrically isolated from the source line and positioned such that the source line does not extend below the second set of vertical pillars is also included. Furthermore, gate terminals of the memory cell access devices laterally surround the first set of vertical pillars and the second set of vertical pillars. Finally, a first word line contact is positioned between two of the second set of vertical pillars. The first word line contact is electrically coupled to the gate terminals.
Public/Granted literature
- US20140256100A1 ELECTRICAL COUPLING OF MEMORY CELL ACCESS DEVICES TO A WORD LINE Public/Granted day:2014-09-11
Information query
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