发明授权
- 专利标题: Method for high volume manufacture of electrochemical cells using physical vapor deposition
- 专利标题(中): 使用物理气相沉积法大量生产电化学电池的方法
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申请号: US13103004申请日: 2011-05-06
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公开(公告)号: US09303315B2公开(公告)日: 2016-04-05
- 发明人: Fabio Albano , Chia-Wei Wang , Ann Marie Sastry
- 申请人: Fabio Albano , Chia-Wei Wang , Ann Marie Sastry
- 申请人地址: US MI Ann Arbor
- 专利权人: Sakti3, Inc.
- 当前专利权人: Sakti3, Inc.
- 当前专利权人地址: US MI Ann Arbor
- 代理机构: Morrison & Foerster LLP
- 主分类号: H05H1/26
- IPC分类号: H05H1/26 ; C23C14/34 ; C23C14/56 ; C23C16/54 ; H01M4/04 ; H01M4/139 ; H01M10/052 ; H01M10/0587 ; H01M10/0562 ; H01M10/0565
摘要:
Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one embodiment, the substrate is moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. Another embodiment employs alternating a direction of movement of the substrate around the reels, with conditions in the chamber differing with each change in direction to result in the sequential build-up of deposited material over time. The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell.
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