发明授权
- 专利标题： Method of manufacturing an electronic component
- 专利标题（中）： 电子部件的制造方法
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申请号： US14135503申请日： 2013-12-19
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公开(公告)号： US09305787B2公开(公告)日： 2016-04-05
- 发明人: Christoph Wilhelm Sele , Monica Johanna Beenhakkers , Gerwin Hermanus Gelinck , Nicolaas Aldegonda Jan Maria Van Aerle , Hjalmar Edzer Ayco Huitema
- 申请人： Creator Technology B. V.
- 申请人地址： NL Breda
- 专利权人： Creator Technology B.V.
- 当前专利权人： Creator Technology B.V.
- 当前专利权人地址： NL Breda
- 主分类号： H01L21/283
- IPC分类号： H01L21/283 ; H01L21/311 ; H01L51/00 ; H01L27/32 ; H01L51/05
摘要：
A method of manufacturing an electric component disclosed. A first electrically conducting layer including a first electrode of the electric component is formed on a substrate. An interlayer of a dielectric material is formed on the first electrically conducting layer, the dielectric material including an electrically insulating material. A further layer of a dielectric material is deposited on the interlayer of dielectric material, the further layer including a photo-patternable electrically insulating material. Both the further layer and said interlayer are structured, wherein the further layer of the dielectric material is used as a mask for the interlayer. A second electrically conducting layer including a second electrode of the electric component is then formed.
公开/授权文献
- US20140120721A1 METHOD OF MANUFACTURING AN ELECTRONIC COMPONENT 公开/授权日：2014-05-01
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