A semiconductor power device is provided, comprising a substrate of a first conductive type, a buffering layer of a second conductive type formed on the substrate, a voltage supporting layer formed on the buffering layer, and alternating sections of different conductive types formed at the substrate. The voltage supporting layer comprises first semiconductor regions of the first conductive type and second semiconductor regions of the second conductive type, wherein the first semiconductor regions and the second semiconductor regions are alternately arranged. The alternating section and the buffering layer form a segmented structure of alternated conductive types, which is used as an anode of the semiconductor device.