Invention Grant
US09306165B2 Replacement materials processes for forming cross point memory 有权
用于形成交叉点记忆的替代材料过程

Replacement materials processes for forming cross point memory
Abstract:
Methods of forming memory cells comprising phase change and/or chalcogenide materials are disclosed. In one aspect, the method includes providing a lower line stack extending in a first direction, the lower line stack comprising a sacrificial line over a lower conductive line. The method further includes forming a chalcogenide line extending in the first direction by selectively removing the sacrificial material of the sacrificial line and replacing the sacrificial line with a chalcogenide material.
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