Invention Grant
- Patent Title: Multi-disk chemical mechanical polishing pad conditioners and methods
- Patent Title (中): 多盘化学机械抛光垫调节剂及方法
-
Application No.: US14256704Application Date: 2014-04-18
-
Publication No.: US09308623B2Publication Date: 2016-04-12
- Inventor: Hung Chen , Shou-Sung Chang , Jason Garcheung Fung , Matthew A. Gallelli , Paul D. Butterfield , Kevin Chou
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B24B53/017
- IPC: B24B53/017

Abstract:
A pad conditioner may include multiple independently mounted conditioning elements configured to condition a polishing pad used in, e.g., a chemical mechanical polishing (CMP) process. In some embodiments, the pad conditioner may include a main assembly disk and a main assembly base plate attached to the main assembly disk via a gimbal connection. A plurality of pad conditioner assemblies may be attached to the main assembly base plate. In some embodiments, each pad conditioner assembly may include a pad conditioner disk attached to the main assembly base plate, a pad conditioner base attached to the pad conditioner disk via a gimbal connection, and a conditioning element attached to the pad conditioner base. Methods of conditioning a polishing pad are also provided, as are other aspects.
Public/Granted literature
- US20140315473A1 MULTI-DISK CHEMICAL MECHANICAL POLISHING PAD CONDITIONERS AND METHODS Public/Granted day:2014-10-23
Information query