发明授权
- 专利标题: Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus
- 专利标题(中): 用于在微光刻投影曝光设备的物平面中设置扫描集成照明能量的组件
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申请号: US12916882申请日: 2010-11-01
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公开(公告)号: US09310692B2公开(公告)日: 2016-04-12
- 发明人: Ralf Stuetzle , Martin Endres , Jens Ossmann , Michael Layh
- 申请人: Ralf Stuetzle , Martin Endres , Jens Ossmann , Michael Layh
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102008001553 20080505
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03F7/20
摘要:
A component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus is disclosed. The component includes a plurality of diaphragms which are arranged alongside one another with respect to a direction perpendicular to the scan movement and which differ in their form and the position of which can be altered approximately in the scan direction so that a portion of the illumination energy can be vignetted by at least one diaphragm. The form of the individual diaphragm is specifically adapted to the form of the illumination in a diaphragm plane in which the component is arranged. This has the effect that at least parts of the delimiting edges of two diaphragms always differ in the case of an arbitrary displacement of the diaphragms.
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