Invention Grant
- Patent Title: Net-voltage-aware optical proximity correction (OPC)
- Patent Title (中): 净电压感知光学邻近校正(OPC)
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Application No.: US14261632Application Date: 2014-04-25
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Publication No.: US09311442B2Publication Date: 2016-04-12
- Inventor: Shayak Banerjee , James A. Culp , Ian P. Stobert
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/36 ; G03F7/20

Abstract:
Various embodiments include computer-implemented methods, computer program products and systems for verifying an integrated circuit (IC) layout. In some cases, approaches include a computer-implemented method of verifying an IC layout, the method including: obtaining data about a process variation band for at least one physical feature in the IC layout; determining voltage-based process variation band thresholds for the at least one physical feature in the IC layout; determining whether the process variation band for the at least one physical feature in the IC layout meets design specifications for the IC layout based upon the voltage-based process variation band thresholds for the at least one physical feature in the IC layout; and modifying the IC layout in response to a determination that the process variation band for the at least one physical feature does not meet the design specifications.
Public/Granted literature
- US20150310155A1 NET-VOLTAGE-AWARE OPTICAL PROXIMITY CORRECTION (OPC) Public/Granted day:2015-10-29
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